By Topic

Realization of hybrid microfluidic systems using standard LTCC process

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
L. Rebenklau ; Electron. Technol. Lab., Tech. Univ. Dresden, Germany ; K. -J. Wolter ; S. Howitz

The paper reports some results of a cooperation research in which the possibility to realize microfluidic components and modules by using low temperature cofiring ceramic multilayer (LTCC-ML) technology is examined. The main goal is the development of LTCC multilayer which are carrier for microfluidic Silicon components and combine electrical and fluidic functions. Also fluidic mixer elements and hybrid microvalves were developed. These different components are combined during the examinations to realize a microscope chamber. This is a fluidic microsystem to inspect and treatment smallest samples for life science applications. It can be used in high resolution microscopes. The microscope chamber consists of a LTCC manifold which contains fluidic channels and forms the carrier for assembled microfluidic and electric silicon components

Published in:

Electronic Components & Technology Conference, 2000. 2000 Proceedings. 50th

Date of Conference:

2000