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CMOS compatible thermoelectric infrared sensors

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2 Author(s)
Chin-Shown Sheen ; Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Sien Chi

A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices

Published in:

Electronics Letters  (Volume:36 ,  Issue: 13 )