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Low-loss cascadable MEMS distributed X-band phase shifters

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2 Author(s)
Hayden, Joseph S. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Rebeiz, G.M.

A wideband distributed coplanar-waveguide (CPW) phase shifter has been developed for X-band operation. The design is based on the distributed MEMS transmission line (DMTL) loaded with high capacitance-ratio varactors. The varactors are fabricated using a series combination of MEMS bridges and fixed-value MIM capacitors. A high-capacitance ratio varactor (1.5-2.5) results in a large loading on the CPW line and therefore a large phase shift. A distributed phase shifter was fabricated on a 500 μm quartz substrate, and achieved a true-time delay operation from 1 to 10 GHz with a reflection coefficient less than ~15 dB, and 1800/dB of insertion loss at 8-10 GHz. It is possible with this design to cascade the DMTL to result in 2- and 3-bit phase shifters with excellent wideband performance at X-band frequencies

Published in:

Microwave and Guided Wave Letters, IEEE  (Volume:10 ,  Issue: 4 )

Date of Publication:

Apr 2000

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