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Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case

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3 Author(s)

For pt. I see ibid., vol. 9, no. 2, p. 262-9 (2000). Reduced-order dynamic macromodels to describe the behavior of microelectromechanical system structures with stress stiffening are presented in this paper. The approach is based on potential and kinetic energy representations of selected fundamental modes of motion, modified to take account of stress stiffening. Energy data are calculated by several finite-element runs, fitted to polynomial functions, and used to develop the equations of motion according to Lagrangian mechanics. The accuracy and restrictions of these macromodels are shown.

Published in:

Microelectromechanical Systems, Journal of  (Volume:9 ,  Issue: 2 )

Date of Publication:

June 2000

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