Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net

Proposes the modeling and performance evaluation of a controlled IC foundry fab using a distributed colored timed Petri net (DCTPN). A DCTPN is designed for highly model-mixed and flexible routing manufacturing systems. The distributed models can be integrated through communication places, and the manufacturing execution system (MES) can be executed using a COM (component object model) server place. Especially the process activities of a general IC foundry tool are analyzed, modeled and grouped into a basic tool model library. Based on the tool model library, an entire fab model can be constructed. The DCTPN-based fab model can act as a virtual fab, and be used to estimate fab performance and fab behaviors. In addition, the DCTPN conflict resolution and token competition rules are used to control a fab. Finally, a simplified 200 mm IC fab is presented and its system performance, including throughput, stage move, WIP (wafer in process) distribution, lot cycle time, and utilization, is evaluated. The operation histories of tools and lots are also included. The entire fab model has been verified in a real IC foundry fab