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Suppression of mechanical coupling for parallel beam gyroscope

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5 Author(s)
Sato, H. ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; Fukuda, T. ; Arai, F. ; Itoigawa, K.
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A parallel beam structure has many significant features, as follows. (i) The tip moves in parallel at the end. (ii) This structure converts a small displacement into a concentrated large strain. (iii) Each unit doesn't interfere with the other units by piling up structures. (iv) The lateral rigidity is high. We propose this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In this paper is shown the method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close together. Then we propose the suppression method of the mechanical coupling that arises by bringing two resonance frequencies close. From this result, this structure suits for the gyroscope. Experimental results are shown

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Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on  (Volume:4 )

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