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High-divider-ratio fast-response capacitive dividers for high-voltage pulse measurements

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3 Author(s)
Jayaram, S. ; Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada ; Xu, X.Y. ; Cross, J.D.

This paper reports the experimental results of the development of a novel capacitive divider for high-voltage pulse measurements. The low-voltage (LV) arm capacitor was prepared by thermally growing silicon oxide on commercially available silicon wafers to form capacitors of very large capacitance per unit area (>10 nF with 2 μm oxide thickness on a 30 mm-diameter wafer). With the proposed design for LV arm capacitance, divider ratios of the order >10000 can easily be obtained

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Industry Applications, IEEE Transactions on  (Volume:36 ,  Issue: 3 )