Referenced Items are not available for this document.
This paper presents a method for the, three-dimensional (3-D) visualization of device parameters to help identify potential regions of operation as well as highlighting process interactions. The results of the visualization are color-coded mappings of the device parameters and regions that meet the required specification, both showing three process parameters simultaneously. The mappings can be presented as rotating volumes (cubes) and slice plot. They can be obtained with relative ease using commercially available software, and the approach could easily be integrated into existing simulation software
Published in:
Semiconductor Manufacturing, IEEE Transactions on
(Volume:13
,
Issue:
2
)
Date of Publication: May 2000
- Page(s):
- 249 - 254
- ISSN :
- 0894-6507
- INSPEC Accession Number:
- 6620227
- Digital Object Identifier :
- 10.1109/66.843641
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- May 2000
- Sponsored by :
- IEEE Components, Packaging and Manufacturing Technology Society
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