Cart (Loading....) | Create Account
Close category search window
 

Thermoelectric microsensors and microactuators (MEMS) fabricated by thin film technology and micromachining

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Volklein, F. ; Fac. of Phys. Technol., Univ. of Appl. Sci., Russelsheim, Germany ; Blumers, M. ; Schmitt, L.

The fabrication of thermoelectric microsensors and microactuators using thin film deposition technique and micromachining is demonstrated. Sensors with high sensitivity can be realized by anisotropic etching of silicon substrates with very thin membranes (thickness d=100 nm) or cantilever beams of silicon carbide, silicon nitride or silicon oxide. Such membranes or beams enable a good thermal insulation of the sensor films. These films (BiSbTe, polysilicon) are patterned by photolithographic technique. Most of the sensor fabrication steps are compatible with standard-IC technologies and can be performed by a batch-process. We report on the design and development of a thermopile-sensor array with integrated signal processing, the fabrication of a thermoelectric vacuum microsensor for the low vacuum range, of a heat flux sensor and of an integrated thermoelectric microcooler. The properties and parameters of these devices are represented and discussed.

Published in:

Thermoelectrics, 1999. Eighteenth International Conference on

Date of Conference:

Aug. 29 1999-Sept. 2 1999

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.