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A low-impedance coplanar waveguide using an SrTiO3 thin film for GaAs power MMIC's

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4 Author(s)
Tanabe, M. ; Electron. Res. Lab., Matsushita Electron. Corp., Osaka, Japan ; Nishitsuji, Mitsuru ; Anda, Y. ; Ota, Yorito

A novel structure for coplanar-waveguide transmission lines with low impedance and low loss is demonstrated in this paper. The new structure simply has a high dielectric SrTiO3 thin film underneath the coplanar conductors. Due to the high dielectric constant of SrTiO3, the coplanar line exhibited characteristic impedance as low as 18 Ω with a slot width of 5 μm and the center conductor width of 50 μm, while a conventional coplanar line on GaAs showed only 30 Ω with the same configuration. The newly developed coplanar structure is easily applicable for present GaAs monolithic-microwave integrated-circuit (MMIC) technology, especially for power MMIC's and low-impedance devices

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:48 ,  Issue: 5 )