By Topic

Surface acoustic wave-based sensors using mode conversion in an array of periodic gratings

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
F. Bender ; Angewandte Phys. Chem., Heidelberg Univ., Germany ; R. Dahint ; F. Josse

Novel surface acoustic wave (SAW) sensor platforms with electrode-free sensing surface are being investigated for use in applications in which the sensing environment may be conducting or corrosive. It is shown that, by using a system of four grating arrays, the IDT generated SAW can be directed to the opposite surface where it interacts with a chemical sensing medium before being directed back to the electroded surface. The design principles of these grating-based SAW sensor platforms are discussed. The signal quality and the mass sensitivity of the devices are analyzed and compared to those of a direct path SAW using chemical vapor deposited thin polymer films. Experimental results are presented for the detection of nitrogen dioxide (NO2) in sub-ppm concentrations on devices fabricated on YZ-LiNbO3 plates

Published in:

Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European  (Volume:2 )

Date of Conference:

1999