The authors have investigated the selective growth of GaAs/AlGaAs MQW PIN diodes by atmospheric pressure MOCVD. A patterned spin-on silica film was used to restrict single-crystal growth to the exposed areas of the substrate. It was found that high-quality material can be grown by selective area epitaxy although edge effects currently limit the device performance
Published in:
Electronics Letters
(Volume:24
,
Issue:
14
)
Date of Publication: 7 Jul 1988