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Microfabricated fluxgate sensors with low noise and wide bandwidth

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1 Author(s)
Robertson, P.A. ; Dept. of Eng., Cambridge Univ., UK

Miniature fluxgate magnetic sensors have been micro-fabricated using thin film planar technology on glass substrates. The 1000×200 μm sensors comprise a copper multilayer solenoid winding with a thin amorphous cobalt alloy core deposited by RF magnetron sputtering. The bandwidth and sensitivity of a closed-loop sensor system using these novel devices is 0-2.5 MHz and 5000 V/T, respectively, with a spectral noise density of 2 nT/√Hz at 10 kHz

Published in:

Electronics Letters  (Volume:36 ,  Issue: 4 )