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Computer integrated manufacturing and networking in advanced IC manufacturing

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2 Author(s)
Hugues, J.B. ; SEMY Eng. Inc., Phoenix, AZ, USA ; Sundaram, S.L.

The application of integrated computer control to the manufacture of advanced analog ICs is shown to have a measurable impact on device parameters, wafer throughput, repeatability, and product quality. A representative example based on the evaluation of device current gain uniformity resulting from conventional control technologies is compared to the results obtained in a digitally controlled furnace. A system architecture consisting of microprocessor-based furnace controllers and a powerful cell controller that handles many error-prone functions in the manufacturing process is discussed. Some trends in the future development of such systems are discussed

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Components, Hybrids, and Manufacturing Technology, IEEE Transactions on  (Volume:14 ,  Issue: 3 )