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Statistical control of VLSI fabrication processes

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2 Author(s)
Mozumder, P.K. ; Texas Instrum. Inc., Dallas, TX, USA ; Strojwas, A.J.

The authors propose a profit-based framework for an integrated CAD-CAM system for VLSI design and manufacturing. The inefficiencies of present-day CAM systems are due to the lack of appropriate methodologies for process monitoring and statistical techniques to analyze the in-process and end-of-process data. Methodologies for monitoring lots in fabrication lines using in situ measurements and controlling lots using the multivariate distribution of observable in-process parameters were developed. The software system which implements the algorithms has shown encouraging results when applied to industrial fabrication lines

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Components, Hybrids, and Manufacturing Technology, IEEE Transactions on  (Volume:14 ,  Issue: 3 )