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Simulation of high sensitivity and stability surface acoustic wave NO2 gas sensor based on amplitude variations as measurand

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3 Author(s)
El-Shennawy, K. ; Fac. of Eng. & Technol., Arab Acad. for Sci. & Technol. & Martime Transp., Alexandria, Egypt ; Orabi, M.S. ; Taha, T.E.

This paper presents the use of Surface Acoustic Wave (SAW) devices as gas sensors utilizing Multi-Strip Coupler (MSC), where the amplitude of the SAW's is the measured quantity, based on conductivity changes of the used sensor film. A theoretical model for SAW-MSC on LiNbO3 substrate and using Copper phthalocyanine (CuPc) as a sensor layer for NO2 gas sensor is illustrated. A computer simulation program is developed to obtain the variations in the insertion loss (IL) of the device under the adsorption influence of the substance to be detected, and its results are compared with the published experimental results

Published in:

Microelectronics, 2000. Proceedings. 2000 22nd International Conference on  (Volume:2 )

Date of Conference:

2000