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Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films

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3 Author(s)
Yamamoto, M. ; Opto-Electo Mech. Res. Lab., Matsushita Res. Inst. Tokyo Inc., Kawasaki, Japan ; Kanno, Isaku ; Aoki, S.

A new profile measurement probe for non-destructive evaluation of high aspect ratio micro structure (HARMS) is proposed. The probe is made of tungsten carbide super hard alloy (WC) and machined by micro EDM. PZT thin films are coated on the probe as an integrated strain sensor. Dedicated measurement machine equipped with this probe is developed and we observed micro holes and gears. In these observations, we obtained very clear images of the sample's detailed shapes, which demonstrate the system's validation for HARMS evaluation

Published in:

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Date of Conference:

23-27 Jan 2000