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In this paper, a fast efficient Method of Moments (MoM) based on a new subdomain partitioning technique is presented for rapidly extracting the distributed capacitance and inductance of spiral inductors. By using this approach, the analytical formula of Green's function for multi-layer substrates is obtained through the prioritized wave-tracing method. The computing time is much faster than the state-of-the-art capacitance and inductance solvers, such as FMMS. Good agreement between numerical results and measurement data is shown to demonstrate the accuracy of the proposed new method.