Integrated control of microactuators and integrated circuits: a new turning approach in MEMS technology

Advances in micro-machining, micro-, nano- and meso-scale electromechanical devices and integrated circuits (ICs), when combined, provide enabling benefits and capabilities to manufacture microelectromechanical systems (MEMS). Critical issues to be solved are to improve power and thermal management, circuitry and actuator/sensor integration, and embedded electronically controlled micro-actuator assemblies. Very large scale integrated circuit and micromachining silicon, germanium, and gallium arsenic technologies have been developed and used to manufacture ICs and micro-actuators. While promising developments have been deployed to fabricate MEMS, a spectrum of challenging problems to be solved remains. In order to improve the performance, the motion control problem must be addressed and solved, particularly in prospective applications of MEMS in aerospace and automotive industry, where microactuators, multistable relays, micro-connectors, micropropulsion, micro-optical systems, as well as active control micro-devices are used. The solution of a spectrum of problems in nonlinear analysis, design and optimization of MEMS lead to the development of superior MEMS. Analytical, numerical, and experimental results are presented to demonstrate the methods and algorithms applied in nonlinear analysis, design, and control.