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Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes

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4 Author(s)
Fisher, D. ; Dept. of Mech. Eng., California Univ., Berkeley, CA, USA ; Freed, M. ; Spanos, C. ; Poolla, K.

We first motivate the use of autonomous micro-sensor arrays for use in semiconductor manufacturing. Following this, we discuss three critical issues that must be addressed in order to realize our goal of building these micro-sensor arrays. We then describe our on-going development-efforts of fabricating spatially resolved etch-rate and temperature sensors

Published in:

Decision and Control, 1999. Proceedings of the 38th IEEE Conference on  (Volume:4 )

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