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Nondestructive measurement of phase velocity of surface acoustic waves using matched filters

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1 Author(s)
M. Hirabayashi ; Device Technol. Res Lab., Sony Corp., Kanagawa, Japan

A technique for measuring SAW velocity on unprocessed wafers placed on patterns of matched filters made on a glass plate is reported. The velocity measured on quartz agrees with the value measured destructively. The relative error of +or-110 p.p.m. means that this is currently the most precise nondestructive measuring technique.

Published in:

Electronics Letters  (Volume:26 ,  Issue: 6 )