Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Correia, J.H. ; Dept. of Ind. Electron., Minho Univ., Guimaraes, Portugal ; Bartek, M. ; Wolffenbuttel, R.F.

A microspectrometer has been realized based on an array of Fabry-Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also a FWHM below 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout. Such a device is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique

Published in:

Electron Devices, IEEE Transactions on  (Volume:47 ,  Issue: 3 )