By Topic

Future media manufacturing-more than just conventional sputtering

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
B. Cord ; Balzers Process Syst. GmbH, Alzenau, Germany ; J. Scherer

Trends for further developments in vacuum processing of hard disks are discussed. Future tools should offer extended process capabilities such as in situ substrate cleaning, deposition of multilayer structures, fast ramping of substrate temperature, and high energy deposition. The design challenge will be to adapt these steps-many of them already used in other vacuum applications-to the 2-5 s process times common in disk manufacturing.

Published in:

IEEE Transactions on Magnetics  (Volume:36 ,  Issue: 1 )