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We have fabricated photolithographically defined organic thin film transistors (TFTs) on glass or plastic substrates with carrier field-effect mobility larger than 1 cm/sup 2//V-s, using the organic semiconductor pentacene as the active layer. In addition to high carrier mobility, devices on glass substrates have subthreshold slope as low as 0.4V/decade. TFT performance for devices on both substrate types was extracted at low bias (less than -30 V). These results are the best reported to date for organic TFTs on polymeric and glass substrates.