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The processes of a gas production were investigated during microwave pulses in microsecond vircator. The influence of vacuum conditions was investigated and the velocity of cathode plasma was determined. Specific values of gas desorption and the partial composition was investigated for different cathodes. The parameters of the diode electron accelerator are the following: beam energy 300 keV, beam current up to 10 kA, half-period 1,5 /spl mu/s. Cathode and anode diameters are 10 cm and 20 cm, accordingly. Vacuum chamber diameter is 50 cm, anode-cathode gap is 2 cm. The duration of microwave radiation is 0,5 /spl mu/s, wavelength is about 10 cm, output microwave power is about 1.5/spl middot/10/sup 8/ W. Amount of gassing reaches 0.3 cm/sup 3/. Ion energy reaches 200-300 keV value.