By Topic

Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approach

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Ming-Hung Lin ; Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Li-Chen Fu

A generalized stochastic colored timed Petri net (GSCTPN) is used to model an IC wafer fabrication system. There are two major sub-models: a process flow model and transportation model. There are two different automated guided vehicle systems, namely, the interbay system and intrabay system. For multiple-load and variable-speed AGV systems, we embed a simple motion-planning rule and introduce a collision avoidance strategy in the model to solve the variable speed and traffic jam problems of vehicles. The simple control policies for AGV visiting and AGV routing are discussed. The heuristic rules for lot release and lot scheduling are also studied. To obtain performance measures, simulation is used. To show the promising potential of the proposed work, a real-word IC wafer fabrication system is used as a target plant layout for implementation

Published in:

Systems, Man, and Cybernetics, 1999. IEEE SMC '99 Conference Proceedings. 1999 IEEE International Conference on  (Volume:3 )

Date of Conference: