By Topic

Using simulation and genetic algorithms to improve cluster tool performance

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Dimmler, M.A. ; Inst. of Comput. Sci., Wurzburg Univ.

Cluster tools have gained importance in the fabrication of semiconductor chips. In this paper, we present an approach to generate optimal processing sequences of lots using cluster tools. We consider the problem of sequencing n lots, where each lot can be processed by any of m available cluster tools. The proposed method combines simulation and a genetic algorithm to generate lot processing sequences. We show that our approach leads to a significant reduction of the cycle times of the cluster tools

Published in:

Simulation Conference Proceedings, 1999 Winter  (Volume:1 )

Date of Conference:

1999