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Behavioral modeling of microelectromechanical systems (MEMS) with statistical performance-variability reduction and sensitivity analysis

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3 Author(s)
A. Dewey ; Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA ; H. Ren ; T. Zhang

An approach to behavioral modeling of microelectromechanical systems (MEMS) is presented emphasizing robust design that minimizes the effects of device parametric variability on overall performance. Using a novel application of Taguchi experimental design and statistical process-control methods, statistical performance-variability reduction and parametric sensitivity analysis are studied. Taguchi performance-variability reduction and parametric sensitivity analyses introduce design-for-manufacturing into behavioral modeling. An example is given for the robust behavioral modeling of a microelectromechanical laterally driven electrostatic-comb microresonator. Applications of the behavioral-modeling approach to high-performance design, manufacturing yield optimization, and operational reliability assessment are also given

Published in:

IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing  (Volume:47 ,  Issue: 2 )