By Topic

40 nm electron beam patterning and its application to silicon nano-structure fabrication

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Sangyeon Han ; Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea ; Taejnn Park ; Bonkee Kim ; Hyungcheol Shin
more authors

We report on 40 nm patterning using an E-beam lithography system. SAL601 negative E-beam resist was used for this experiment. In order to utilize the maximum ability of the E-beam system, we reduced the PR thickness to 100 nm, and the field size to 200 μm. In this way, PEB (Post Expose Bake) time and temperature, which are very important factors for nanopatterning, were reduced for minimum line width. In addition, digitizing was optimized for better results. Quantum wires, quantum dots, and quantum dots on a narrow channel, which can be used for nano-scale memory devices (such as single electron memory devices), were fabricated using these lithography techniques

Published in:

VLSI and CAD, 1999. ICVC '99. 6th International Conference on

Date of Conference: