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Fabrication of Ti:sapphire thin films by pulsed-laser deposition

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6 Author(s)
H. Uetsuhara ; Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan ; S. Goto ; Y. Nakata ; N. Vasa
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We describe the fabrication of Ti:sapphire thin films by pulsed laser deposition (PLD) and their optical characteristics. The reduction of droplets, which is always problematic in PLD, with a high-speed rotating target is also presented to achieve a low loss optical film.

Published in:

Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on  (Volume:3 )

Date of Conference:

Aug. 30 1999-Sept. 3 1999