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Perspectives on MEMS in bioengineering: a novel capacitive position microsensor [and laser surgery and drug delivery applications]

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4 Author(s)
Pedrocchi, A. ; Dept. of Bioeng., Politecnico di Milano, Italy ; Hoen, S. ; Ferrigno, G. ; Pedotti, A.

We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10× model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-μm range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.

Published in:

Biomedical Engineering, IEEE Transactions on  (Volume:47 ,  Issue: 1 )