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Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

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5 Author(s)
Clayton, C.R. ; State Univ. of New York, Stony Brook, NY, USA ; Monserrat, M.E. ; Halada, G.P. ; Fountzoulas, C.G.
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Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar+ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5)4 (CH3)4Si3O2 oil onto silicon wafer substrates. The sp3/sp2 bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology is also discussed

Published in:

Ion Implantation Technology Proceedings, 1998 International Conference on  (Volume:2 )

Date of Conference:

Dec 1999