The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micrometres is reported. Measurements at a wavelength of 1.3 and 1.55 mu m yield waveguide losses below 0.5 dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.
Published in:
Electronics Letters
(Volume:27
,
Issue:
16
)
Date of Publication: 1 Aug. 1991