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Integrated optical waveguide components fabricated by LIGA technique

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8 Author(s)
Paatzsch, T. ; Inst. fur Mikrotech. Mainz GmbH, Germany ; Bauer, H.-D. ; Gaudron, A. ; Jobst, B.
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The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes

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LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting  (Volume:2 )

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