Integrated optical waveguide components fabricated by LIGA technique

The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes.