Micromachined high-Q resonators, low-loss diplexers, and low phase-noise oscillators for a 28 GHz front-end

This paper presents an alternative method of implementing high-Q resonators using micromachining techniques. Micromachining is used to selectively remove the substrate and suspend conductor patterns to result in very low loss structures that are accurately defined with standard photolithography. This paper demonstrates how this technique can be applied to filters, diplexers, and oscillators at 28 GHz. These components are compact, require no manual tuning, and can be fabricated in large quantities.