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Temperature microsensors

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4 Author(s)
Mitin, V.F. ; Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine ; Kholevchuk, V.V. ; Konakova, R.V. ; Boltovet, N.S.

We have developed and investigated several types of miniature cryogenic resistance thermometers based on germanium films on gallium arsenide and silicon thermodiode temperature sensors. A small-scale production of these devices is organized. The temperature measurement intervals of the resistance thermometers cover the 25 mK to 300 K temperature range, while those of thermodiodes cover the 4 to 600 K temperature range

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999

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