By Topic

Optical actuation of micromechanical tunneling structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Dragoman, M. ; Nat. Res. & Dev. Inst. in Microtechnol., Bucharest, Romania ; Dragoman, D.

An efficient method to optically actuate a micromechanical cantilever is presented. Measurable responses are obtained for moderate light sources if electron tunneling occurs between the cantilever tip and a metallic contact below it. The small cantilever deflection due to light pressure produces large tunneling current variations. Several applications are presented

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999