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Microstructural features of nanocrystalline porous silicon

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6 Author(s)
Teodorescu, V.S. ; Nat. Inst. of Mater. Phys., Magurele, Romania ; Nistor, L.C. ; Blanchin, M.G. ; Ianeu, V.
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Microstructural features of nanocrystalline porous silicon films, obtained from both scanning and transmission electron microscopy, are presented. The films show a double scale porosity. The macroporosity forms an alveolar structure at a micrometric scale and the nanoporosity forms a silicon nanowires network in the bulk of the alveolar walls

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Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:1 )

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