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Design and performance of a SAW ladder-type filter at 3.15 GHz using SAW mass-production technology [wireless LANs]

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8 Author(s)
Springer, A. ; Inst. for Commun. & Inf. Eng., Linz Univ., Austria ; Hollerweger, F. ; Weigel, R. ; Berek, S.
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To meet the increasing demand for high-performance filters in gigahertz radio-communication systems, we have improved the design techniques and fabrication processes for surface-acoustic wave (SAW) devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 μm. As a first SAW device prototype, we designed and fabricated a ladder-type bandpass filter from LiTaO3 substrates, at 3.15 GHz having a 3 dB-bandwidth of 128 MHz and a minimum insertion loss of 1.7 dB

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:47 ,  Issue: 12 )