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Microwave modeling and characterization of thick coplanar waveguides on oxide-coated lithium niobate substrates for electrooptical applications

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8 Author(s)
Ghione, G. ; Dipt. di Elettronica, Politecnico di Torino, Italy ; Goano, M. ; Madonna, GianLuigi ; Omegna, G.
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A set of thick coplanar waveguides on lithium niobate substrates with and without a thin SiO2 buffer layer, has been experimentally characterized through on-wafer measurements. The effective refractive index and attenuation were extracted from raw (uncalibrated) measurements up to 40 GHz through the thru-reflection-line approach. The characteristic impedance was then obtained from the propagation constant, using an accurate estimate of the in-vacuo capacitance from a new conformal mapping approach able to account for large electrode thickness. We observed that the attenuation of lines with or without the oxide buffer layer consistently exhibits a different frequency behavior, thus suggesting that dielectric losses can play a significant role in the upper microwave range. This is confirmed by the results from a full quasi-TEM analytical model, including losses and frequency dispersion. The measured and simulated data show good agreement both for the propagation characteristics (attenuation and effective permittivity) and for the line impedance

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:47 ,  Issue: 12 )