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A 2D CMOS microfluxgate sensor system for digital detection of weak magnetic fields

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5 Author(s)
Kawahito, Shoji ; Dept. of Inf. & Comput. Sci., Toyohashi Univ. of Technol., Japan ; Maier, C. ; Schneiher, M. ; Zimmermann, M.
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This paper presents a CMOS two-dimensional (2-D) vector magnetic sensor system integrating two planar microfluxgate sensors and the complete electronics for sensor excitation and signal readout. The system is based on an industrial 0.8-μm double-poly, double-metal CMOS technology with ferromagnetic NiFeMo cores added in a simple postprocessing sequence. The fluxgate sensors are embedded in a ΣΔ analog-to-digital converter for a stable and precise digital detection of weak magnetic fields. A cascaded ΣΔ modulator topology is utilized to obtain second-order noise shaping and to suppress pattern noise. Within the range of ±50 μT, the system nonlinearity is less than 1.5 μT. The angular resolution as a 2D vector sensor is less than 4° for a measured magnetic induction of 50 μT. This makes the 2-D microfluxgate magnetometer suitable for use as fully integrated electronic compass

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:34 ,  Issue: 12 )

Date of Publication:

Dec 1999

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