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Equipment and APC integration at AMD with workstream

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1 Author(s)
Lantz, M. ; AMD, Sunnyvale, CA, USA

This paper discusses the reason for starting the equipment integration project at AMD's Submicron Development Center, SDC, and how it led to the development of the APC framework. The architecture of the workstream, EIs and APC and how they function together are covered

Published in:

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Date of Conference: