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Utilizing a distributed data collection system to perform predictive maintenance (PdM) and equipment reliability studies

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2 Author(s)
Seltzer, J.H. ; White Oak Semicond., Sandston, VA, USA ; Hertle, J.

The Diffusion Engineering Department at White Oak Semiconductor designed, installed, and implemented a computer-based Distributed Data Collection System (DDCS) to monitor and record various process equipment sensor variables that are typically not available via a Semiconductor Standard SECS/GEM interface. As these sensors and controllers become more intelligent, it is important to leverage their capabilities to perform predictive maintenance and reliability studies. Importance was also placed on being able to expand and adapt this system over time

Published in:

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Date of Conference: