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A design flow for micromachined electromechanical systems

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1 Author(s)
Swart, N.R. ; Analog Devices Inc., Cambridge, MA, USA

I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given.

Published in:

Design & Test of Computers, IEEE  (Volume:16 ,  Issue: 4 )