System Maintenance:
There may be intermittent impact on performance while updates are in progress. We apologize for the inconvenience.
By Topic

Megasonic transducer drive utilizing MOSFET DC-to-RF inverter with output power of 600 W at 1 MHz

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Suzuki, T. ; Dept. of Electr. Eng., MUNEN TV MFG Co. Ltd., Nagpya, Japan ; Ikeda, H. ; Yoshida, H. ; Shinohara, S.

This paper describes MOSFET power inverter systems, each provided to drive a megasonic transducer with an output power of 600 W at a frequency of 1 MHz. Since the megasonic transducer is used as a resonant load with a series resistance of approximately 1 Ω, the impedance characteristic of the megasonic transducer used as an inverter load is analyzed and compared with measured data. A new method is developed to match the inverter output impedance to the load impedance of as low as 1 Ω at the resonant frequency using a high-performance output transformer which can feed RF power to the load at high efficiency. The output transformer having a primary-to-secondary winding ratio of 2 to 1 was used by the inverter to drive the megasonic transducer. Based on the analysis of the impedance characteristics of the load, two types of MOSFET dc-to-RF power inverters, a full-bridge version and a single-ended version, were designed and built. These power inverters were put into practical use in cleaners. The power conversion efficiency was greater than 80% for the full-bridge version at an output of approximately 600 W and 50% for the single-ended version at an output power of approximately 600 W. When the megasonic transducer was operated with an input power of 600 W. the operation was satisfactory

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:46 ,  Issue: 6 )