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Micro-sensor arrays for calibration, control, and monitoring of semiconductor manufacturing processes

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4 Author(s)
Fisher, D. ; Dept. of Mech. Eng., California Univ., Berkeley, CA, USA ; Freed, M. ; Spanos, C. ; Poolla, K.

In this paper we first motivate the use of autonomous micro-sensor arrays for use in semiconductor manufacturing. Following this, we discuss three critical issues that must be addressed in order to realize our goal of building these micro-sensor arrays. We then describe our on-going development efforts of fabricating spatially resolved etch-rate and temperature sensors

Published in:

Control Applications, 1999. Proceedings of the 1999 IEEE International Conference on  (Volume:1 )

Date of Conference:

1999