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MEMS based on III-V-compounds for sensing applications and optical communication

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5 Author(s)
H. L. Hartnagel ; Inst. fuer Hochfrequenztech., Tech. Univ. Darmstadt, Germany ; K. Mutamba ; J. Pfeiffer ; R. Riementschneider
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Recent developments in micromachining techniques based on III-V-compounds have led to the fabrication of new sensing and actuator devices for a variety of applications in control and measurement systems as well as in optical communication. This work reports on various III-V-based MEMS concepts for sensing applications in the fields of mechanical engineering, microwave electronics and WDM systems for optical communication. The described devices include integrated GaAs/AlGaAs pressure sensors, thermoelectrical sensors for gas flow, infrared detection and RF power measurement. Micromachined Fabry-Perot Filters for dense WDM systems illustrate the integration of electromechanical and optical functions.

Published in:

Device Research Conference Digest, 1999 57th Annual

Date of Conference:

23-23 June 1999