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A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch

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3 Author(s)
R. T. Chen ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; H. Nguyen ; M. C. Wu

A low-voltage electrostatically actuated 2×2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror displacement (300 μm) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 μs), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.

Published in:

IEEE Photonics Technology Letters  (Volume:11 ,  Issue: 11 )