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3-D microfabricated toroidal planar inductors with different magnetic core schemes for MEMS and power electronic applications

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2 Author(s)
Liakopoulos, T.M. ; Dept. of Electr. & Comput. Eng. & Comput. Sci., Cincinnati Univ., OH, USA ; Ahn, C.H.

Micromachined toroidal planar inductors that have three different magnetic core structures have been designed, fabricated, and characterized for MEMS and power electronic applications. A plain ring core shows a high inductance value of 10 μH in a low frequency range below 2 kHz, whereas both a ring core with an air gap and a spiral type core show higher inductance values in a high frequency range of 2 kHz-1 MHz. The inductors have a low resistance value of ~1.5 Ω with total dimensions 4 mm×1.5 mm×120 μm

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Magnetics, IEEE Transactions on  (Volume:35 ,  Issue: 5 )