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FEM analysis of thin-film inductors used in GHz frequency bands

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5 Author(s)
Tanabe, S. ; Mitsubishi Electr. Corp., Hyogo, Japan ; Shiraki, Y. ; Itoh, K. ; Yamaguchi, M.
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Three dimensional finite element method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors. A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results

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Magnetics, IEEE Transactions on  (Volume:35 ,  Issue: 5 )